Product Overview:

This X-ray crystal orientation instrument is designed for high-precision alignment of the reference plane of single crystal rods using X-ray diffraction technology. It is capable of aligning the primary crystallographic plane (commonly the <A> face) for rods with diameters of 2, 4, and 6 inches. The system supports both standard and custom orientations such as C or R planes, making it suitable for various semiconductor and crystal processing applications.

Key Features:

• Stable Reference Platform:
  The machine features a rigid base platform fixed to the main structure, serving as a horizontal reference during measurement. The right side of the platform is designed for positioning, while the left side includes a screw-lock clamping mechanism to hold the fixture and crystal securely in place.

• Precise Orientation of <A> Plane:
  The system enables accurate alignment of the <A> reference face, with a standard θ angle of 18.917° (18°55′00″). Alternative orientations can be configured upon request to accommodate different crystallographic directions.

• User-Friendly Operation:

  • Instrument Calibration: Performed using a standard crystal rod to ensure reliable angle alignment.

  • Positioning and Scanning: After cleaning, the fixture is placed on the platform and adjusted until the X-ray beam irradiates the cylindrical surface.

  • Peak Detection: The rod is slowly rotated under X-ray exposure. When the μA meter reaches its maximum reading, the crystal is properly aligned and locked in place.

  • Grinding Preparation: The aligned crystal can be removed and transferred directly to a grinding machine for surface processing.

• Automatic Vertical Adjustment:
  Supports auto-lifting functionality for convenient height adjustment during the measurement process.

Technical Specifications:

Applications:

This X-ray orientation system is ideal for use in semiconductor crystal manufacturing, including silicon, sapphire, and compound materials, where precise crystallographic alignment is required prior to wafer slicing or surface processing. It also supports research and development in material science and crystal engineering.

Q&A – Frequently Asked Questions

Q1: What types of crystals are compatible with this X-ray orientation instrument?
A1: The instrument is compatible with a variety of single crystal materials such as silicon, sapphire, SiC (silicon carbide), GaN, and other compound semiconductors. It supports rod diameters of 2, 4, and 6 inches.

Q2: Can the instrument measure crystal orientations other than the <A> plane?
A2: Yes, besides the <A> reference plane (θ = 18.917°), the system can be configured to measure other crystallographic directions, such as the C-axis or R-axis, according to customer requirements.

Q3: How is the instrument calibrated?
A3: Calibration is performed using a certified standard crystal rod. This ensures the system's angular precision and repeatability before processing production samples.

Q4: Is the measurement process automatic or manual?
A4: The system combines manual placement and adjustment with automated features, including automatic shutter control and vertical lifting, to simplify operation and improve efficiency.

Q5: What safety measures are included to handle X-ray radiation?
A5: The instrument uses a low-power X-ray tube and includes shielding measures to minimize exposure. Users should always operate the equipment following standard radiation safety protocols and avoid exceeding the recommended current limit of 2.0mA.

Q6: What maintenance is required for long-term use?
A6: Regular cleaning of the fixture and platform is essential. Periodic inspection of the X-ray tube, detectors, and electrical connections is also recommended. X-ray tube life can be extended by operating within the safe current range.

Q7: Can the instrument be used in a cleanroom environment?
A7: Yes, the compact design and enclosed structure make it suitable for cleanroom applications, provided proper handling and maintenance are observed.

Q8: Is customization available for different crystal sizes or orientations?
A8: Yes, the system can be customized to support different crystal sizes, specialized fixture designs, or non-standard orientation angles upon request.

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